18-403 Microfabrication Methods and Technology

12 units, Carnegie Mellon University

This course is a laboratorybased introduction to the theory and practice of microfabrication. Lectures and laboratory sessions cover fundamental processing techniques such as photomask creation, lithographic patterning, thin film vacuum deposition processes, wetchemical and dryetching processes. This is primarily a handson laboratory course which brings students into the microfabrication facility and device testing laboratories. Students will fabricate electronic and optoelectronic devices such the metaloxidesemiconductor MOS capacitor, the Schottky diode, the MOS transistor, the solar cell, and the lightemitting diode. An understanding of the operation of these building block devices will be gained by performing measurements of their electrical and optoelectronic characteristics. Emphasis is placed on understanding the interrelationships between the materials properties, processing, device structure, and the electrical and optical behavior of the devices. The course is intended to provide a background for a deeper appreciation of solid state electronic devices and integrated circuits. 2 lecture periods per week and a minimum of 4 laboratory hours.

Prerequisites: 18-310

Courseweave needs JavaScript to show sections, workloads and planning tools.